半导体
Erodex produce a wide range of parts and tooling for the semiconductor industries. Materials such as fine-grained graphites, ultra purified graphites, graphite foil, pure tungsten, silicon carbide and vitreous and pyrolytic graphites are machined for the following applications.
- 加热器
- 坩埚
- 垫圈
- 碳化硅（SiC）晶片载体
- SiC 模晶圆
- 感应器
- LTO 注射管
- 玻璃与金属密封夹具
- 钨和石墨离子注入设备部件